Panel Capability
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Thinckness 1-12mm (Customized Rack for <1mm ) Standard 22x27' (32pnl) Max. 27x44' (16pnl)
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Cycle Time Desmear 20-30min
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Desmear+Activation 30-45min
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Throughput# Desmear 64-98 pnl/hour
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Desmear+Activation 32-48 pnl/hour
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Uniformity >80% 5 or 9 Points per cell, 3 cells(Left,Middle,Right)
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Etch(Desmear) Rate >0.3um/min
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CF4 Consumption 3%-8% (Desmear)
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Pump down performance Ultimate<30mT, Leak Rate<20mT/min; Process Pressure 200-300mT
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RF generator 10KW/40KHz
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Purged N2 Purity 99%
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Heating up 1-2℃/min; (proprietary design for minimized heating tim