• Panel Capability

    • Thinckness 1-12mm (Customized Rack for <1mm ) Standard 22x27' (32pnl) Max. 27x44' (16pnl)

    • Cycle Time Desmear 20-30min

    • Desmear+Activation 30-45min

    • Throughput# Desmear 64-98 pnl/hour

    • Desmear+Activation 32-48 pnl/hour

    • Uniformity >80% 5 or 9 Points per cell, 3 cells(Left,Middle,Right)

    • Etch(Desmear) Rate >0.3um/min

    • CF4 Consumption 3%-8% (Desmear)

    • Pump down performance Ultimate<30mT, Leak Rate<20mT/min; Process Pressure 200-300mT

    • RF generator 10KW/40KHz

    • Purged N2 Purity 99%

    • Heating up 1-2℃/min; (proprietary design for minimized heating tim

  • Model - AnPT-R250 AnPT-R500

    FPC Size

    • Width 50-250mm 50-550mm
    • Thickness 25-400um
    • Capacity (speed) 0.5-4 m/min
    • Uniformity3 Points/cell>80%
    • Desmear
    • Surface 0.5-5m/min
    • Etch rate >0.3um/min
    • CF4 Cost 3%-8% (Desmear)
    • Correction accuracy +/-1mm
    • Tension Controll
    • Roll Size 500mm
    • Scroll Size 3"/6" 20 – 100 N
    • Vacuum Min<30mT, Leak rate<30mT/min; Pressure180-300mT
    • RF Power 5KW/40KHz
    • N2 Generator Purity 99%
    • Heating Rate 3-4℃/min
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