Panel Capability

• Thinckness 1-12mm (Customized Rack for <1mm ) Standard 22x27' (32pnl) Max. 27x44' (16pnl)

• Cycle Time Desmear 20-30min

• Desmear+Activation 30-45min

• Throughput# Desmear 64-98 pnl/hour

• Desmear+Activation 32-48 pnl/hour

• Uniformity >80% 5 or 9 Points per cell, 3 cells(Left,Middle,Right)

• Etch(Desmear) Rate >0.3um/min

• CF4 Consumption 3%-8% (Desmear)

• Pump down performance Ultimate<30mT, Leak Rate<20mT/min; Process Pressure 200-300mT

• RF generator 10KW/40KHz

• Purged N2 Purity 99%

• Heating up 1-2℃/min; (proprietary design for minimized heating tim