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AnPT V30 Plasma System

Panel Capability

  • Thinckness 1-12mm (Customized Rack for <1mm ) Standard 22×27′ (32pnl) Max. 27×44′ (16pnl)

  • Cycle Time Desmear 20-30min

  • Desmear+Activation 30-45min

  • Throughput# Desmear 64-98 pnl/hour

  • Desmear+Activation 32-48 pnl/hour

  • Uniformity >80% 5 or 9 Points per cell, 3 cells(Left,Middle,Right)

  • Etch(Desmear) Rate >0.3um/min

  • CF4 Consumption 3%-8% (Desmear)

  • Pump down performance Ultimate<30mT, Leak Rate<20mT/min; Process Pressure 200-300mT

  • RF generator 10KW/40KHz

  • Purged N2 Purity 99%

  • Heating up 1-2℃/min; (proprietary design for minimized heating tim

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