Model – AnPT-R250 AnPT-R500
FPC Size
- Width 50-250mm 50-550mm
- Thickness 25-400um
- Capacity (speed) 0.5-4 m/min
- Uniformity3 Points/cell>80%
- Desmear
- Surface 0.5-5m/min
- Etch rate >0.3um/min
- CF4 Cost 3%-8% (Desmear)
- Correction accuracy +/-1mm
- Tension Controll
- Roll Size 500mm
- Scroll Size 3″/6″ 20 – 100 N
- Vacuum Min<30mT, Leak rate<30mT/min; Pressure180-300mT
- RF Power 5KW/40KHz
- N2 Generator Purity 99%
- Heating Rate 3-4℃/min
