Home/Plasma/RTR Plasma

RTR Plasma

Model – AnPT-R250 AnPT-R500

FPC Size

  • Width 50-250mm 50-550mm
  • Thickness 25-400um
  • Capacity (speed) 0.5-4 m/min
  • Uniformity3 Points/cell>80%
  • Desmear
  • Surface 0.5-5m/min
  • Etch rate >0.3um/min
  • CF4 Cost 3%-8% (Desmear)
  • Correction accuracy +/-1mm
  • Tension Controll
  • Roll Size 500mm
  • Scroll Size 3″/6″ 20 – 100 N
  • Vacuum Min<30mT, Leak rate<30mT/min; Pressure180-300mT
  • RF Power 5KW/40KHz
  • N2 Generator Purity 99%
  • Heating Rate 3-4℃/min
Category:

Description

DOWNLOAD BROCHURE

Title

Go to Top